High Efficiency Microwave Heating Technology 2026/09/29

Introductions

For precision heating requiring accurate temperature control, electric or indirect combustion heating is commonly used, resulting in higher pollution and prolonged heating cycles. Microwave heating technology allows the wavelength to directly penetrate and heat the material, leading to localized temperature increases, reduced annealing temperatures for semiconductors, and shorter times to reach target temperatures.

Technical Advantages and Features

• Multi-mode: By adjusting the spatial arrangement of microwave electric fields and signals, the number of modes increases fourfold, enhancing the objectivity of analysis results.
• Energy Efficient at Low Temperature: Microwave annealing is a low-temperature process with workpiece temperatures at about half those of traditional RTA or laser methods, saving at least 60% in energy.
• High Annealing Uniformity: Product uniformity exceeds 99%, meeting the semiconductor industry standard of approximately 99%.

Industrial Applications and Business Opportunities

• Industry Applications
  • Wafer annealing processes in the semiconductor industry, drying processes in the food industry, and synthesis or cracking processes in the chemical industry.
• Application Examples
  • In the food industry, this technology has been applied to baking processes, achieving over 30% electricity savings and reducing heating time by more than 50%.
  • Low-temperature microwave annealing has been validated in semiconductor fabs, delivering over 60% energy savings.
  • The process achieves annealing uniformity that meets semiconductor industry standards and successfully reduces related annealing costs by more than 50%.