紅外光加熱與滾輪式接觸轉印技術應用於製作微奈米結構

滾輪式紅外光輔助金屬轉印技術採用一般紅外燈管當加熱源，將矽模仁上的次微米級圖形轉印到2cm×2cm 大小的石英基板上，而且分別有七種不同的圖形分布在石英基板上，搭配後續的蝕刻製作出石英模仁。最後利用此技術可以在石英基板上定義出100 nm的線寬，線與線之間距亦為100 nm。

The nano-imprinting method named Roller-Based and Infrared-Assisted Metal Contact Printing Technology applys infrared lamp for the heating source and transfers the sub-micro-patterns on the silicon mold to Quartz which is 2 × 2cm2 in dimension. There are seven kinds of pattern on the Quartz. After etching, the Quartz mold is fabricated. Finally, we can define the diameter of the line is 100 nm on the Quartz and the spacing is also 100 nm.