應用速度控制於主動式雷射光點位置飄移補償系 統之研究與驗證

在精密光學量測領域中，雷射干涉儀技術是驗證奈米級定位精度的核心科技之一，其光程差的 絕對穩定性對量測結果具決定性影響。然而，工業環境的微振動與空氣擾動常導致光束飄移，傳統被 動減振難以抑制持續性擾動，進而引發相位失真與數據失效。為突破限制，本研究提出基於快速轉向 鏡 (Fast Steering Mirror, FSM) 的補償架構進行實驗驗證。該研究以LabVIEW 為軟體控制核心，透過 動態調速與微步距演算法，即時偵測光點偏移並驅動馬達進行精確的閉迴路速度控制，進而實現雷 射光點位置的穩定控制，為工業精密量測設備的穩定度優化與誤差防護提供高可靠度的解決方案。

In the field of precision optical metrology, the laser interferometer serves as the core equipment for verifying nanoscale positioning accuracy, and the absolute stability of its optical path difference decisively impacts measurement outcomes. However, micro-vibrations and air turbulence in industrial environments frequently induce laser beam drift. Conventional passive vibration isolation techniques struggle to suppress persistent disturbances, subsequently leading to phase distortion and data invalidation. To overcome these limitations, this study proposes and experimentally verifies a compensation architecture based on a Fast Steering Mirror (FSM). Utilizing LabVIEW as the central software control platform, this research employs dynamic speed regulation and micro-stepping algorithms to detect laser spot deviations in real time and drive motors for precise closed-loop speed control. This enables the stable control of the laser spot position, thereby providing a highly reliable solution for stability optimization and error mitigation in industrial precision measurement equipment.