超快雷射突衝模式製程應用之機會

本研究探討超快雷射突衝模式的特性與其在未來精密製造中的應用潛力。突衝模式有別於以往單脈衝加工模式，透過在極短時間內發射多個高頻脈衝，實現高效材料去除率與低熱損傷，適合應用於微米與奈米級的精密加工。此模式不僅可大幅提升製作精度，亦能雕刻複雜結構，除了在加工速度有大幅的進步外，更可有效減少雷射加工時作用在材料表面的熱影響區，實現高品質的製程表面與細緻精準的加工。因此，這種模式下的加工製程，對於高精度需求的加工尤為重要，可預期此模式在微加工領域得到更廣泛的應用，尤其是在電子元件和生物醫學裝置的製作中。

This study explores the characteristics of the burst mode of ultrafast lasers and its potential applications in future precision manufacturing. Unlike traditional single-pulse processing modes, burst mode operates by emitting multiple high-frequency pulses in an extremely short period, achieving high material removal rates with minimal thermal damage, making it suitable for micro and nanoscale precision processing. This mode not only significantly enhances fabrication precision but also enables the machining of complex structures. In addition to substantial improvements in processing speed, it effectively reduces the heat-affected zone on the material surface caused by laser ablation, allowing for higher quality surfaces and more intricate and precise processing. Therefore, processes using this mode are particularly important for applications requiring high precision. It is anticipated that this mode will find broader applications in microfabrication, especially in the production of electronic components and biomedical devices.