逆式奈米轉印技術介紹

本文主要是介紹逆式奈米轉印技術的起源、製程特色、相關應用及目前國內外的研究現況。首先，在技術起源的部分，將引用美國密西根大學彭教授的研究成果，並介紹三種主要的逆式壓印製程及其特色，另外將介紹目前學術界與產業界相關的應用以及國內外研究單位的研發現況。逆式奈米壓印技術與傳統奈米壓印製程相較之優勢是在於能在軟性基材上，製作所需的圖案；三種主要的逆式奈米轉印技術的種類，分別是熱壓式（embossing）、沾印式（inking）與全層轉印式（whole-layer transfer），此三種轉印製程的差異性在於模具上的高分子層覆蓋模具平面之平坦度。在逆式奈米轉印技術的相關應用，生物檢測、DNA 定位及微流道製作是目前的主流，而在目前國內外之研究方面，除了台灣之外，美國與韓國皆投注相當心力在此領域。未來，最新的製程技術將把轉印物由單純的高分子材料轉變為金屬或是多功能性的材料，同時也探討此技術在軟性電子產業的應用契機。

The article discusses the origin, process, applications and current researches of reversed nanoimprint technology. Firstly, about the origin, the research performance of Peng, department of electrical engineering and computer science, solid state electronic lab, the University of Michigan, Ann Arbor, Michigan, will be cited. Then three different pattern-transfer modes of reversed nanoimprint technology which Peng developed will be introduced, too. Besides, the related applications and researches of reversed nanoimprint technology in academia and industrial circles will be referred. The reversed nanoimprint technology offers an advantage over conventional nanoimprinting by allowing imprinting onto substrates that cannot be easily spin coated, such as flexible polymer substrates. Three different kinds pattern-transfer modes as following are embossing, inking and whole-layer transfer. These three nanoimprinting modes have been quantitatively correlated with the surface planarization of the mold after polymer coating. About the related applications of reversed nanoimprint technology, microelectronic and biomedical devices, DNA orientation and micro channel fabrication should be useful. About the research status, including Taiwan, US and South Korea invested lots of time and money in developing reversed nanoimprint technology. Besides, to replace polymer with metal as the transfer layer is the latest process of reversed nanoimprint technology. It titled direct metallic reversed nanoimprint technology. In this article, it will be discussed.