金屬奈微米結構對氮化物多重量子井發光效率之探討

本文主要探討在氮化銦鎵多重量子井表面製作不同深度的奈微米尺度光柵，並在此光柵鍍上不同厚度的銀薄膜，藉由表面電漿效應來提高發光二極體的發光效率。由此不同結構下之光激發光，驗證奈微米尺度光柵的深度愈深，則發光強度愈強；且在不同深度的光柵上鍍銀薄膜後，得到當金屬薄膜愈靠近主動層，則其發光效率愈顯著提升。

In order to improve the luminescence efficiency of LED with the surface Plasmon effect, we fabricated gratings with variable periods and depths onto the surface of the InGaN MQWs, and deposited the silver thin films of variable thickness on these gratings. Then we measured the photo- luminescence (PL) spectra of InGaN MQWs with surface micro-gratings coated with the silver thin films of variable thickness. We found that deeper depth of this grating, the PL enhancement was stronger. In addition, after the deposition of silver thin film on these gratings with variable depths, the luminescence efficiency enhancement was more apparent when the silver thin films were closer to InGaN MQWs.