簡介 Introductions
半導體真空泵智慧監診方案，整合泵浦自身運轉狀態以及迴轉件產生的振動訊號，透過一種新穎的設備健康指標（台灣及美國專利）進行運轉狀態識別，提升泵浦使用週期且適時地更換泵浦。
The semiconductor vacuum pump smart monitoring solution integrates the pump's own operating status and the vibration signal generated by the rotating parts, and uses a novel equipment health indicator (Taiwan and US patent) to identify the operating status, improve the pump life cycle and replace the pump in a timely manner .
特色與創新 Characters and Innovations
- 自動預估設備使用餘命。
- 避免設備無預警停機。
- 延長平均故障時間。
- 簡單且直觀的指標依據。
- Automatic analysis to indicate remaining life.
- Avoid equipment downtime without warning.
- Extending mean time to failure.
- Based on simple and intuitive indicator.