整合機器手臂之常壓微能量束光學元件面形修 整技術

本研究提出一套可於常壓大氣環境下運作之機器手臂微能量束自動化面形修整技術。系統透過射 頻 (RF) 激發 Ar 與 CF₄ 反應性氣體產生高活性自由基，利用非接觸式之物理與化學反應機制進行局部材料 移除，並結合六軸工業機器手臂，以提升加工範圍與自動化能力。研究中針對製程參數進行分析，結果 顯示材料移除深度與工作距離之間具有高度相關的非線性特性，其回歸模型決定係數達 R² = 0.9965；此 外，線掃描測試亦成功建立移動速度與材料移除量之對應關係。於面形修整實驗中，石英工件之面形精度 (Surface figure error) 由初始約 0.7λ 改善至 0.27λ，RMS 則降低至 0.05λ。研究結果驗證該技術具備於常 壓環境下實現高精度、自動化光學面形修整之可行性，並展現其於高階光學元件製造與自由曲面加工應 用之潛力。

This study proposes a robot-assisted micro-energy beam figuring technology operating under atmospheric-pressure conditions for automated optical surface correction. The system employs radio-frequency (RF) excitation of Ar and CF₄ reactive gases to generate highly active radicals, enabling localized material removal through a non-contact physicochemical reaction mechanism. A six-axis industrial robotic manipulator is integrated to enhance processing flexibility, workspace coverage, and automation capability. Process parameter analysis reveals a strong nonlinear correlation between material removal depth and stand-off distance, with the regression model achieving a coefficient of determination of R² = 0.9965. In addition, line-scanning experiments establish the relationship between scanning velocity and material removal rate. Figure correction experiments on quartz substrates demonstrate that the peak-to-valley (PV) surface error was improved from approximately 0.7λ to 0.27λ, while the root mean square (RMS) was reduced to 0.05λ. The results verify the feasibility of achieving high-precision optical surface figuring under atmospheric conditions and demonstrate the potential of the proposed approach for advanced optical component fabrication and freeform surface manufacturing.