鏡片波前量測及波前修正技術介紹

在半導體光學鏡片製造中，波前量測與波前修正技術扮演關鍵角色。量測鏡片後相對理想參考面的波前誤差，能確認出鏡片整體性能。以顯微鏡中的管鏡 (Tube Lens) 為例，本文利用四波剪切干涉技術 (Quadriwave Lateral Shearing Interferometry, QWLSI) 進行波前量測，透過干涉條紋分析、傅立葉頻域濾波、波前梯度回推與相位積分重建等流程，重建出波前資訊。此資訊不僅可判斷出鏡片像差，更可將誤差轉換成加工移除量，導引非接觸式加工方法。展望新一代大氣電漿與離子束修整技術，借波前修正手法，將有效修整鏡片表面形貌來降低波前誤差，提升光學元件成像品質。

In the manufacturing of semiconductor optical lenses, wavefront measurement and wavefront correction technology play a key role. Measuring the wavefront error of the lens relative to the ideal reference surface can confirm the overall performance of the lens. Taking the tube lens in the microscope as an example, this article uses Quadriwave Lateral Shearing Interferometry (QWLSI) to measure the wavefront, and reconstructs the wavefront information through interference fringe analysis, Fourier frequency domain filtering, wavefront gradient backpropagation and phase integral reconstruction. This information can not only determine the lens aberration, but also convert the error into the processing removal, guiding the non-contact processing method. Looking forward to the new generation of atmospheric plasma and ion beam trimming technology, using wavefront correction techniques, will effectively trimming the lens surface morphology to reduce wavefront errors and improve the imaging quality of optical components