在機器人研磨或拋光的加工過程中,往往無法線上量測研拋墊的狀態,藉由開發 AI 輔助研拋墊磨耗估測技術,解決加工品質不一及效率不彰的問題。
During the robot automation grinding or polishing process, it is challenging to measure the states of the grinding pad while under process. Therefore, there is a need to develop reliable and accurate methods to resolve this problem in order to maintain consistent processing quality and efficiency.
AI智能晶圓研磨加工系統 內建「超音波」除屑效率快五倍
CPS研磨拋光機器人技術
CPS研磨拋光機器人2.0技術